TY - JOUR
T1 - Microstructure and nanomechanical properties of magnetron sputtered Ti − Nb films
AU - Photiou, D.
AU - Panagiotopoulos, N. T.
AU - Koutsokeras, L.
AU - Evangelakis, G. A.
AU - Constantinides, G.
PY - 2016/9/25
Y1 - 2016/9/25
N2 - Titanium niobium (Ti − Nb) films, covering a broad spectrum of compositions, are deposited on silicon substrates using magnetron co-sputtering. The morphological, crystallographic and mechanical characteristics of the films are studied using scanning electron microscopy (SEM), X-ray diffraction (XRD) and nanoindentation, respectively. The Ti − Nb films exhibit a columnar growth and contain porosity at volumetric percentages of 2–14 vol%. Furthermore, it is observed that the allotropic β − Ti phase can be stabilized at room temperature for Nb compositions beyond 20 at%. Phase composition and microstructural details have subsequent implications on the mechanical properties of the films which are studied experimentally and micromechanically. Among the tested compositions, Ti85Nb15 exhibits the lowest elastic modulus. The obtained structure–property relations could serve as a tool for material optimization.
AB - Titanium niobium (Ti − Nb) films, covering a broad spectrum of compositions, are deposited on silicon substrates using magnetron co-sputtering. The morphological, crystallographic and mechanical characteristics of the films are studied using scanning electron microscopy (SEM), X-ray diffraction (XRD) and nanoindentation, respectively. The Ti − Nb films exhibit a columnar growth and contain porosity at volumetric percentages of 2–14 vol%. Furthermore, it is observed that the allotropic β − Ti phase can be stabilized at room temperature for Nb compositions beyond 20 at%. Phase composition and microstructural details have subsequent implications on the mechanical properties of the films which are studied experimentally and micromechanically. Among the tested compositions, Ti85Nb15 exhibits the lowest elastic modulus. The obtained structure–property relations could serve as a tool for material optimization.
KW - Electron microscopy
KW - Nanoindentation
KW - Titanium alloys
KW - X-ray diffraction
KW - β − Ti poromechanics
UR - http://www.scopus.com/inward/record.url?scp=84975486163&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2016.06.014
DO - 10.1016/j.surfcoat.2016.06.014
M3 - Article
AN - SCOPUS:84975486163
SN - 0257-8972
VL - 302
SP - 310
EP - 319
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
ER -