Microstructure and nanomechanical properties of magnetron sputtered Ti − Nb films

D. Photiou; N. T. Panagiotopoulos; L. Koutsokeras; G. A. Evangelakis; G. Constantinides

doi:10.1016/j.surfcoat.2016.06.014

Microstructure and nanomechanical properties of magnetron sputtered Ti − Nb films

D. Photiou, N. T. Panagiotopoulos, L. Koutsokeras, G. A. Evangelakis, G. Constantinides

Department of Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Titanium niobium (Ti − Nb) films, covering a broad spectrum of compositions, are deposited on silicon substrates using magnetron co-sputtering. The morphological, crystallographic and mechanical characteristics of the films are studied using scanning electron microscopy (SEM), X-ray diffraction (XRD) and nanoindentation, respectively. The Ti − Nb films exhibit a columnar growth and contain porosity at volumetric percentages of 2–14 vol%. Furthermore, it is observed that the allotropic β − Ti phase can be stabilized at room temperature for Nb compositions beyond 20 at%. Phase composition and microstructural details have subsequent implications on the mechanical properties of the films which are studied experimentally and micromechanically. Among the tested compositions, Ti₈₅Nb₁₅ exhibits the lowest elastic modulus. The obtained structure–property relations could serve as a tool for material optimization.

Original language	English
Pages (from-to)	310-319
Number of pages	10
Journal	Surface and Coatings Technology
Volume	302
DOIs	https://doi.org/10.1016/j.surfcoat.2016.06.014
Publication status	Published - 25 Sept 2016

Keywords

Electron microscopy
Nanoindentation
Titanium alloys
X-ray diffraction
β − Ti poromechanics

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10.1016/j.surfcoat.2016.06.014

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title = "Microstructure and nanomechanical properties of magnetron sputtered Ti − Nb films",

abstract = "Titanium niobium (Ti − Nb) films, covering a broad spectrum of compositions, are deposited on silicon substrates using magnetron co-sputtering. The morphological, crystallographic and mechanical characteristics of the films are studied using scanning electron microscopy (SEM), X-ray diffraction (XRD) and nanoindentation, respectively. The Ti − Nb films exhibit a columnar growth and contain porosity at volumetric percentages of 2–14 vol%. Furthermore, it is observed that the allotropic β − Ti phase can be stabilized at room temperature for Nb compositions beyond 20 at%. Phase composition and microstructural details have subsequent implications on the mechanical properties of the films which are studied experimentally and micromechanically. Among the tested compositions, Ti85Nb15 exhibits the lowest elastic modulus. The obtained structure–property relations could serve as a tool for material optimization.",

keywords = "Electron microscopy, Nanoindentation, Titanium alloys, X-ray diffraction, β − Ti poromechanics",

author = "D. Photiou and Panagiotopoulos, {N. T.} and L. Koutsokeras and Evangelakis, {G. A.} and G. Constantinides",

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T1 - Microstructure and nanomechanical properties of magnetron sputtered Ti − Nb films

AU - Photiou, D.

AU - Panagiotopoulos, N. T.

AU - Koutsokeras, L.

AU - Evangelakis, G. A.

AU - Constantinides, G.

PY - 2016/9/25

Y1 - 2016/9/25

N2 - Titanium niobium (Ti − Nb) films, covering a broad spectrum of compositions, are deposited on silicon substrates using magnetron co-sputtering. The morphological, crystallographic and mechanical characteristics of the films are studied using scanning electron microscopy (SEM), X-ray diffraction (XRD) and nanoindentation, respectively. The Ti − Nb films exhibit a columnar growth and contain porosity at volumetric percentages of 2–14 vol%. Furthermore, it is observed that the allotropic β − Ti phase can be stabilized at room temperature for Nb compositions beyond 20 at%. Phase composition and microstructural details have subsequent implications on the mechanical properties of the films which are studied experimentally and micromechanically. Among the tested compositions, Ti85Nb15 exhibits the lowest elastic modulus. The obtained structure–property relations could serve as a tool for material optimization.

AB - Titanium niobium (Ti − Nb) films, covering a broad spectrum of compositions, are deposited on silicon substrates using magnetron co-sputtering. The morphological, crystallographic and mechanical characteristics of the films are studied using scanning electron microscopy (SEM), X-ray diffraction (XRD) and nanoindentation, respectively. The Ti − Nb films exhibit a columnar growth and contain porosity at volumetric percentages of 2–14 vol%. Furthermore, it is observed that the allotropic β − Ti phase can be stabilized at room temperature for Nb compositions beyond 20 at%. Phase composition and microstructural details have subsequent implications on the mechanical properties of the films which are studied experimentally and micromechanically. Among the tested compositions, Ti85Nb15 exhibits the lowest elastic modulus. The obtained structure–property relations could serve as a tool for material optimization.

KW - Electron microscopy

KW - Nanoindentation

KW - Titanium alloys

KW - X-ray diffraction

KW - β − Ti poromechanics

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VL - 302

SP - 310

EP - 319

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Microstructure and nanomechanical properties of magnetron sputtered Ti − Nb films

Abstract

Keywords

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