Photomodulated thermoreflectance microscopy applied on ion-implanted materials

C. Sherifi, M. D. Papademetriou, M. Nestoros, C. Christofides

Research output: Contribution to journalArticlepeer-review


Photomodulated Thermoreflectance Microscopy (microPMTR) combines the non contact and non destructive character of plwtothermal techniques with the ability of high resolution monitoring of the surface and subsurface status of a sample. In this work the experimental set-up is presented in detail and a series of micro-FMTR frequency scans on ion - implanted Si wafers is quantitatively analyzed and discussed. The future research directions in the field of Auger recombination and micro device inspection are also discussed.

Original languageEnglish
Pages (from-to)3767-3770
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Issue number12
Publication statusPublished - 2008


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