Photomodulated Thermoreflectance Microscopy (microPMTR) combines the non contact and non destructive character of plwtothermal techniques with the ability of high resolution monitoring of the surface and subsurface status of a sample. In this work the experimental set-up is presented in detail and a series of micro-FMTR frequency scans on ion - implanted Si wafers is quantitatively analyzed and discussed. The future research directions in the field of Auger recombination and micro device inspection are also discussed.
|Number of pages||4|
|Journal||Physica Status Solidi (C) Current Topics in Solid State Physics|
|Publication status||Published - 2008|