Abstract
Photomodulated Thermoreflectance Microscopy (microPMTR) combines the non contact and non destructive character of plwtothermal techniques with the ability of high resolution monitoring of the surface and subsurface status of a sample. In this work the experimental set-up is presented in detail and a series of micro-FMTR frequency scans on ion - implanted Si wafers is quantitatively analyzed and discussed. The future research directions in the field of Auger recombination and micro device inspection are also discussed.
Original language | English |
---|---|
Pages (from-to) | 3767-3770 |
Number of pages | 4 |
Journal | Physica Status Solidi (C) Current Topics in Solid State Physics |
Volume | 5 |
Issue number | 12 |
DOIs | |
Publication status | Published - 2008 |