Photomodulated thermoreflectance microscopy applied on ion-implanted materials

C. Sherifi, M. D. Papademetriou, M. Nestoros, C. Christofides

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Photomodulated Thermoreflectance Microscopy (microPMTR) combines the non contact and non destructive character of plwtothermal techniques with the ability of high resolution monitoring of the surface and subsurface status of a sample. In this work the experimental set-up is presented in detail and a series of micro-FMTR frequency scans on ion - implanted Si wafers is quantitatively analyzed and discussed. The future research directions in the field of Auger recombination and micro device inspection are also discussed.

Original languageEnglish
Pages (from-to)3767-3770
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume5
Issue number12
DOIs
Publication statusPublished - 2008

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